Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone

Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role it biases sensing, signal-to-noise ratio (SNR) and self-noise. The is multiplied outcome of mechanical electrical sensitivity. As dimensions are limited MEMS technology, improvement by reflecting well domains challenge. This paper reports on new formation D33 mode, coupled based piezoelectric sensing to improve functionalities. unique advancement proposed mode that allows multiple spans regular perform together, despite this increasing diaphragm’s dimensions. At reduced diaphragm size, orientation realizes maximum conversion deflection into significance comparison simulated using COMSOL Multiphysics. Then, proof–of–concept, experimental validation carried out microphone inspired ears fly Ormia ochracea. both ways, results found be substantially improved with approach showing novelty work.